Headquarter address
807-1 Kogaki Motosushi
Gifu Prefecture 501-0463 |
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| We supply metal material for society so that we make role of electronics industry. |
| ↑Click here. You'll see a big picture.↑ |
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| 【 Feature 】 |
| ・ |
Non-contact inspection by laser. |
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Ability to inspect by 0.1μm for a rough surface
0.1nm for a mirror (super smooth)surface. |
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Vibration resistant (system does not require anti-vibration table), because of high speed scanning(0.52msec/30mm/1 line) |
| ・ |
Ability to measure large areas, 30×30mm |
| 【 Application include 】 |
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Super smooth surfaces such as a semiconductor, hard disk, LCD flat panel,
coated surfaces of many materials,and other typical metrological applications. |
| ・ |
Rough surfaces such as “ a copy drum”,textured surfaces,steps, and the such. |
| Angle of an object to be examined |
±4.3° |
| Laser |
Red semiconductor laser |
| Wave length |
650nm |
| Power |
Maximum 30mW |
| Class |
Class3B |
| Diameter |
φ25μm |
| Scan Length |
30mm |
| Scan speed |
30mm/0.52msec/line |
| Scan Height |
0.1nm |
| Scan Width |
25μm |
| Data Acquisition Speed |
8MHz |
Scanning time（30×30mm/
100μm"Pitch" /average 1 time） |
50sec |
| Average treatment times |
1〜99 times |
Showing
mode |
Flatness |
To examine flatness |
| Microwaviness |
To examine roughness |
| Light Field |
To examine slope |
X-Y-Rolling
positioning stage |
X axis |
±50mm ( 0.002mm "Pitch") |
| Y axis |
±50mm ( 0.002mm "Pitch") |
| Rolling axis |
360°( 0.01°"Pitch") |
| Indication |
A profile per lines
3D showing |
| Utility |
AC100V±15％ / 15A |
| Weight (Equipment itself) |
50kg |
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| ↓Click here. You'll see a big picture.↓ |
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| An outside edge of a hard disk |
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The surface of a hard disk （After putting on texture） |
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| A surface of Silicon Wafer |
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A surface of semiconductor pattern |
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| A surface of a liquid panel |
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A surface of a plasma display |
| ■LCD Cleaning System |
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■LCD Carrier Cleaning System |
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| 【 Features 】 |
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Panel by panel cleaning by roll scrubbing |
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High speed cleaning : 10sec/panel |
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Ease of Maintenance |
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Cleaning with no stress to the of Substrate |
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| 【 Features 】 |
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High speed cleaning : 8min/carrier |
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Ease of Maintenance |
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This system has self-cleaning |
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| 【 Panel size capabilities 】 |
| CF： |
L（46.27〜182.75）×W（35.97〜137.1）
t=0.8〜2.2 |
| TFT： |
L（49.7〜186.6）×W（40.8〜142.5）
t=0.8〜2.2 |
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| 【 Carrier size capabilities 】 |
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W333×D294×H420 |
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